"Measurement and Isolation of Thermal Stress in Silicon-On-Glass MEMS ..."

Zhiyong Chen et al. (2018)

> Home

Details and statistics

DOI: 10.3390/S18082603

access: open

type: Journal Article

metadata version: 2024-07-25

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/sensors/ChenGZZW18
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/sensors/ChenGZZW18
Zhiyong Chen, Meifeng Guo, Rong Zhang, Bin Zhou, Qi Wei:
Measurement and Isolation of Thermal Stress in Silicon-On-Glass MEMS Structures. Sensors 18(8): 2603 (2018)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.