"Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of ..."

Uwe Brand et al. (2019)

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DOI: 10.3390/S19061410

access: open

type: Journal Article

metadata version: 2022-04-09

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Uwe Brand, Min Xu, Lutz Doering, Jannick Langfahl-Klabes, Heinrich Behle, Sebastian Bütefisch, Thomas Ahbe, Erwin Peiner, Stefan Völlmeke, Thomas Frank, Bodo Mickan, Ilia Kiselev, Michael Hauptmannl, Michael Drexel:
Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm. Sensors 19(6): 1410 (2019)

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