"Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime."

Boris A. Boom et al. (2021)

> Home

Details and statistics

DOI: 10.3390/S21072566

access: open

type: Journal Article

metadata version: 2021-05-16

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/sensors/BoomBHB21
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/sensors/BoomBHB21
Boris A. Boom, Alessandro Bertolini, Eric Hennes, Jo F. J. van den Brand:
Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime. Sensors 21(7): 2566 (2021)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.