Stop the war!

Остановите войну!

for scientists:

default search action

combined dblp search
author search
venue search
publication search

ask others

"Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in ..."

Umberto Amato et al. (2023)

> Home

Details and statistics

DOI: 10.3390/S23146249

access: open

type: Journal Article

metadata version: 2023-08-31

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/sensors/AmatoAFFGGGMPTV23
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/sensors/AmatoAFFGGGMPTV23
Umberto Amato, Anestis Antoniadis, Italia De Feis, Domenico Fazio, Caterina Genua, Irène Gijbels, Donatella Granata, Antonino La Magna, Daniele Pagano, Gabriele Tochino, Patrizia Vasquez:
Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry. Sensors 23(14): 6249 (2023)

a service of

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.