"Precise Visual Inspection of LSI Wafer Patterns by Local Perturbation ..."

Yukio Matsuyama et al. (1990)

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DOI: 10.1002/SCJ.4690210910

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type: Journal Article

metadata version: 2023-09-13

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Yukio Matsuyama, Hisafumi Iwata, Hitoshi Kubota, Yasuo Nakagawa:
Precise Visual Inspection of LSI Wafer Patterns by Local Perturbation Pattern Matching Algorithm. Syst. Comput. Jpn. 21(9): 99-112 (1990)

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