"Optimum threshold generation for automated visual inspection of ..."

Shunji Maeda, Hitoshi Kubota, Hiroshi Makihira (1996)

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DOI: 10.1002/SCJ.4690271107

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type: Journal Article

metadata version: 2023-09-13

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Shunji Maeda, Hitoshi Kubota, Hiroshi Makihira:
Optimum threshold generation for automated visual inspection of large-scale integration wafer patterns. Syst. Comput. Jpn. 27(11): 74-86 (1996)

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