"Identification of complicated shape objects by fractal characteristic ..."

Masayoshi Kamijo, Masaru Nakazawa, Yoshio Shimizu (1996)

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DOI: 10.1002/SCJ.4690270608

access: closed

type: Journal Article

metadata version: 2023-09-13

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Masayoshi Kamijo, Masaru Nakazawa, Yoshio Shimizu:
Identification of complicated shape objects by fractal characteristic variables - categorizing dust particles on LSI wafer surface. Syst. Comput. Jpn. 27(6): 82-91 (1996)

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