"Scheduling of Time-Constrained Single-Arm Cluster Tools with Two-Space ..."

ChengYu Zou et al. (2024)

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DOI: 10.1109/LRA.2024.3396112

access: closed

type: Journal Article

metadata version: 2024-07-04

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ChengYu Zou, GengHong Wang, Lei Gu, Jie Li, NaiQi Wu, Yan Qiao:
Scheduling of Time-Constrained Single-Arm Cluster Tools with Two-Space Process Modules in Semiconductor Manufacturing. IEEE Robotics Autom. Lett. 9(7): 6352-6359 (2024)

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