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"Model-based process capability indices: The dry-etching semiconductor case ..."
Riccardo Borgoni, Diego Zappa (2020)
- Riccardo Borgoni
, Diego Zappa
:
Model-based process capability indices: The dry-etching semiconductor case study. Qual. Reliab. Eng. Int. 36(7): 2309-2321 (2020)

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