"Integrating the Fault Detection Method and Run-to-Run Control for ..."

Chih-Hung Jen, Jia-Ming Wang (2011)

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DOI: 10.1016/J.PROCS.2011.04.142

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-28

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Chih-Hung Jen, Jia-Ming Wang:
Integrating the Fault Detection Method and Run-to-Run Control for Improving Semiconductor Process Control. ICCS 2011: 1316-1325

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