"Micromachined inertial sensors."

Navid Yazdi, Farrokh Ayazi, Khalil Najafi (1998)

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DOI: 10.1109/5.704269

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type: Journal Article

metadata version: 2022-02-28

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Navid Yazdi, Farrokh Ayazi, Khalil Najafi:
Micromachined inertial sensors. Proc. IEEE 86(8): 1640-1659 (1998)

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