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"CAD challenges for microsensors, microactuators, and microsystems."

Stephen D. Senturia (1998)

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DOI: 10.1109/5.704266

access: closed

type: Journal Article

metadata version: 2022-02-28

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Stephen D. Senturia:
CAD challenges for microsensors, microactuators, and microsystems. Proc. IEEE 86(8): 1611-1626 (1998)

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