"Material and process limits in silicon VLSI technology."

James D. Plummer, Peter B. Griffin (2001)

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DOI: 10.1109/5.915373

access: closed

type: Journal Article

metadata version: 2021-08-17

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James D. Plummer, Peter B. Griffin:
Material and process limits in silicon VLSI technology. Proc. IEEE 89(3): 240-258 (2001)

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