"High-Volume Manufacturing Platform for Silicon Photonics."

Thierry Pinguet et al. (2018)

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DOI: 10.1109/JPROC.2018.2859198

access: closed

type: Journal Article

metadata version: 2025-01-19

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Thierry Pinguet, Scott Denton, Steffen Gloeckner, Michael Mack, Gianlorenzo Masini, Attila Mekis, Simon Pang, Mark Peterson, Subal Sahni, Peter De Dobbelaere:
High-Volume Manufacturing Platform for Silicon Photonics. Proc. IEEE 106(12): 2281-2290 (2018)

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