"Lithography and Other Patterning Techniques for Future Electronics."

R. Fabian W. Pease, Stephen Y. Chou (2008)

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DOI: 10.1109/JPROC.2007.911853

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type: Journal Article

metadata version: 2020-10-02

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R. Fabian W. Pease, Stephen Y. Chou:
Lithography and Other Patterning Techniques for Future Electronics. Proc. IEEE 96(2): 248-270 (2008)

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