"3-D Hyperintegration and Packaging Technologies for Micro-Nano Systems."

Jian-Qiang Lu (2009)

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DOI: 10.1109/JPROC.2008.2007458

access: closed

type: Journal Article

metadata version: 2020-10-02

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Jian-Qiang Lu:
3-D Hyperintegration and Packaging Technologies for Micro-Nano Systems. Proc. IEEE 97(1): 18-30 (2009)

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