"Microactuators and micromachines."

Hiroyuki Fujita (1998)

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DOI: 10.1109/5.704278

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type: Journal Article

metadata version: 2022-02-28

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Hiroyuki Fujita:
Microactuators and micromachines. Proc. IEEE 86(8): 1721-1732 (1998)

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