"History of some early developments in ion-implantation technology leading ..."

Richard B. Fair (1998)

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DOI: 10.1109/5.658764

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type: Journal Article

metadata version: 2022-03-16

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Richard B. Fair:
History of some early developments in ion-implantation technology leading to silicon transistor manufacturing. Proc. IEEE 86(1): 111-137 (1998)

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