"Application of MEMS technology in automotive sensors and actuators."

David S. Eddy, Douglas R. Sparks (1998)

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DOI: 10.1109/5.704280

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type: Journal Article

metadata version: 2022-02-28

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David S. Eddy, Douglas R. Sparks:
Application of MEMS technology in automotive sensors and actuators. Proc. IEEE 86(8): 1747-1755 (1998)

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