"Limits of integrated-circuit manufacturing."

Robert Doering, Yoshio Nishi (2001)

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DOI: 10.1109/5.915380

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type: Journal Article

metadata version: 2022-02-28

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Robert Doering, Yoshio Nishi:
Limits of integrated-circuit manufacturing. Proc. IEEE 89(3): 375-393 (2001)

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