"Surface micromachining for microelectromechanical systems."

James M. Bustillo, Roger T. Howe, Richard S. Muller (1998)

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DOI: 10.1109/5.704260

access: closed

type: Journal Article

metadata version: 2022-03-16

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James M. Bustillo, Roger T. Howe, Richard S. Muller:
Surface micromachining for microelectromechanical systems. Proc. IEEE 86(8): 1552-1574 (1998)

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