"Silicon-on-Insulator Substrates as a Micromachining Platform for Advanced ..."

N. Scott Barker et al. (2017)

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DOI: 10.1109/JPROC.2016.2612191

access: open

type: Journal Article

metadata version: 2024-10-06

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N. Scott Barker, Matthew F. Bauwens, Arthur W. Lichtenberger, Robert M. Weikle:
Silicon-on-Insulator Substrates as a Micromachining Platform for Advanced Terahertz Circuits. Proc. IEEE 105(6): 1105-1120 (2017)

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