"Micromachined thermally based CMOS microsensors."

Henry Baltes, Oliver Paul, Oliver Brand (1998)

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DOI: 10.1109/5.704271

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type: Journal Article

metadata version: 2022-04-09

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Henry Baltes, Oliver Paul, Oliver Brand:
Micromachined thermally based CMOS microsensors. Proc. IEEE 86(8): 1660-1678 (1998)

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