"A Line Extraction Method for Automated SEM Inspection of VLSI Resist."

David B. Shu et al. (1988)

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DOI: 10.1109/34.3875

access: closed

type: Journal Article

metadata version: 2019-12-20

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  - https://dblp.org/rec/journals/pami/ShuLMS88
David B. Shu, Ching-Chung Li, J. F. Mancuso, Yung-Nien Sun:
A Line Extraction Method for Automated SEM Inspection of VLSI Resist. IEEE Trans. Pattern Anal. Mach. Intell. 10(1): 117-120 (1988)

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