"Patterned wafer inspection by high resolution spectral estimation techniques."

Babak Hossein Khalaj, Hamid K. Aghajan, Thomas Kailath (1994)

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DOI: 10.1007/BF01211662

access: closed

type: Journal Article

metadata version: 2017-05-17

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Babak Hossein Khalaj, Hamid K. Aghajan, Thomas Kailath:
Patterned wafer inspection by high resolution spectral estimation techniques. Mach. Vis. Appl. 7(3): 178-185 (1994)

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