"Measurement and analysis of substrate leakage current of RF mems ..."

Y. Q. Zhu et al. (2014)

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DOI: 10.1016/J.MICROREL.2013.07.011

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type: Journal Article

metadata version: 2023-08-04

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Y. Q. Zhu, H. Qian, L. F. Wang, Lei Wang, J. Y. Tang:
Measurement and analysis of substrate leakage current of RF mems capacitive switches. Microelectron. Reliab. 54(1): 152-159 (2014)

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