"Reliability Improvement in Al Metallization: A Combination of Statistical ..."

Guan Zhang et al. (2004)

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DOI: 10.1016/J.MICROREL.2004.07.095

access: closed

type: Journal Article

metadata version: 2020-02-22

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Guan Zhang, Cher Ming Tan, Kok Tong Tan, Derek Sim Kwang Ye, W. Y. Zhang:
Reliability Improvement in Al Metallization: A Combination of Statistical Prediction and Failure Analytical Methodology. Microelectron. Reliab. 44(9-11): 1843-1848 (2004)

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