"Methods to improve reliability of bulge test technique to extract ..."

Hicham Youssef et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.07.013

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type: Journal Article

metadata version: 2024-08-04

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Hicham Youssef, André Ferrand, Pierre-François Calmon, Patrick Pons, Robert Plana:
Methods to improve reliability of bulge test technique to extract mechanical properties of thin films. Microelectron. Reliab. 50(9-11): 1888-1893 (2010)

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