"Characteristics of ZnO thin films prepared by radio frequency magnetron ..."

Ping-Feng Yang et al. (2008)

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DOI: 10.1016/J.MICROREL.2007.08.010

access: closed

type: Journal Article

metadata version: 2023-09-30

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Ping-Feng Yang, Hua-Chiang Wen, Sheng-Rui Jian, Yi-Shao Lai, Sean Wu, Rong-Sheng Chen:
Characteristics of ZnO thin films prepared by radio frequency magnetron sputtering. Microelectron. Reliab. 48(3): 389-394 (2008)

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