"Laser THz emission microscope as a novel tool for LSI failure analysis."

Masatsugu Yamashita et al. (2009)

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DOI: 10.1016/J.MICROREL.2009.07.047

access: closed

type: Journal Article

metadata version: 2021-10-14

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Masatsugu Yamashita, Chiko Otani, Sunmi Kim, Hironaru Murakami, Masayoshi Tonouchi, Toru Matsumoto, Yoshihiro Midoh, Katsuyoshi Miura, Koji Nakamae, Kiyoshi Nikawa:
Laser THz emission microscope as a novel tool for LSI failure analysis. Microelectron. Reliab. 49(9-11): 1116-1126 (2009)

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