"Biaxial initial stress characterization of bilayer gold RF-switches."

K. Yacine et al. (2005)

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DOI: 10.1016/J.MICROREL.2005.07.093

access: closed

type: Journal Article

metadata version: 2022-12-19

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K. Yacine, F. Flourens, David Bourrier, Ludovic Salvagnac, P. Calmont, Xavier Lafontan, Q.-H. Duong, Lionel Buchaillot, D. Peyrou, Patrick Pons:
Biaxial initial stress characterization of bilayer gold RF-switches. Microelectron. Reliab. 45(9-11): 1776-1781 (2005)

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