"Influence of sidewall spacer on threshold voltage of MOSFET with high-k ..."

Jing-Ping Xu et al. (2008)

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DOI: 10.1016/J.MICROREL.2007.03.001

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type: Journal Article

metadata version: 2023-10-02

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Jing-Ping Xu, F. Ji, Pui-To Lai, J. G. Guan:
Influence of sidewall spacer on threshold voltage of MOSFET with high-k gate dielectric. Microelectron. Reliab. 48(2): 181-186 (2008)

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