"Characterisation of the Al2O3 films deposited by ..."

Maciej Wolborski et al. (2006)

> Home

Details and statistics

DOI: 10.1016/J.MICROREL.2005.08.002

access: closed

type: Journal Article

metadata version: 2020-02-22

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mr/WolborskiBOPSRLH06
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mr/WolborskiBOPSRLH06
Maciej Wolborski, Mietek Bakowski, Armando Ortiz, Viljami Pore, Adolf Schöner, Mikko Ritala, Markku Leskelä, Anders Hallén:
Characterisation of the Al₂O₃ films deposited by ultrasonic spray pyrolysis and atomic layer deposition methods for passivation of 4H-SiC devices. Microelectron. Reliab. 46(5-6): 743-755 (2006)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.