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"Standard and self-sustained magnetron sputtering deposited Cu films ..."
Artur Wiatrowski et al. (2011)
- Artur Wiatrowski, W. M. Posadowski, Grzegorz Józwiak, Jaroslaw Serafinczuk, R. F. Szeloch, Teodor P. Gotszalk:
Standard and self-sustained magnetron sputtering deposited Cu films investigated by means of AFM and XRD. Microelectron. Reliab. 51(7): 1203-1206 (2011)
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