"Determining constant voltage lifetimes for silicon nitride capacitors in a ..."

Charles S. Whitman, Michael Meeder (2005)

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DOI: 10.1016/J.MICROREL.2005.01.016

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type: Journal Article

metadata version: 2020-02-22

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Charles S. Whitman, Michael Meeder:
Determining constant voltage lifetimes for silicon nitride capacitors in a GaAs IC process by a step stress method. Microelectron. Reliab. 45(12): 1882-1893 (2005)

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