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"Effect of oval defects in GaAs on the reliability of SiNx ..."
P. J. van der Wel et al. (2007)
- P. J. van der Wel, J. R. de Beer, R. J. M. van Boxtel, Y. Y. Hsieh, Y. C. Wang:
Effect of oval defects in GaAs on the reliability of SiNx metal-insulator-metal capacitors. Microelectron. Reliab. 47(8): 1188-1193 (2007)
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