"Nanotribological properties of ALD-processed bilayer TiO2/ZnO ..."

Wun-Kai Wang et al. (2014)

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DOI: 10.1016/J.MICROREL.2014.07.148

access: closed

type: Journal Article

metadata version: 2020-02-22

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Wun-Kai Wang, Hua-Chiang Wen, Chun-Hu Cheng, Ching-Hua Hung, Wu-Ching Chou, Wei-Hung Yau, Ping-Feng Yang, Yi-Shao Lai:
Nanotribological properties of ALD-processed bilayer TiO₂/ZnO films. Microelectron. Reliab. 54(12): 2754-2759 (2014)

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