"Outgassing study of thin films used for poly-SiGe based vacuum packaging ..."

Bo Wang et al. (2011)

> Home

Details and statistics

DOI: 10.1016/J.MICROREL.2011.06.022

access: closed

type: Journal Article

metadata version: 2020-12-22

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mr/WangTGVSWWW11
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mr/WangTGVSWWW11
Bo Wang, Shuji Tanaka, B. Guo, G. Vereecke, Simone Severi, Ann Witvrouw, Martine Wevers, Ingrid De Wolf:
Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS. Microelectron. Reliab. 51(9-11): 1878-1881 (2011)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.