"Thin dielectric reliability assessment for DRAM technology with deep ..."

Rolf-Peter Vollertsen (2003)

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DOI: 10.1016/S0026-2714(03)00073-8

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type: Journal Article

metadata version: 2020-02-22

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Rolf-Peter Vollertsen:
Thin dielectric reliability assessment for DRAM technology with deep trench storage node. Microelectron. Reliab. 43(6): 865-878 (2003)

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