"Fast and trusted intrinsic stress measurement to facilitate improved ..."

Dietmar Vogel et al. (2016)

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DOI: 10.1016/J.MICROREL.2016.07.115

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type: Journal Article

metadata version: 2022-10-02

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Dietmar Vogel, Ellen Auerswald, Gh. Gadhiya, Sven Rzepka:
Fast and trusted intrinsic stress measurement to facilitate improved reliability assessments. Microelectron. Reliab. 64: 276-280 (2016)

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