"FTIR spectroscopy for the hermeticity assessment of micro-cavities."

David Veyrié et al. (2005)

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DOI: 10.1016/J.MICROREL.2005.07.091

access: closed

type: Journal Article

metadata version: 2020-02-22

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David Veyrié, Djemel Lellouchi, J.-L. Roux, Francis Pressecq, Angie Tetelin, Claude Pellet:
FTIR spectroscopy for the hermeticity assessment of micro-cavities. Microelectron. Reliab. 45(9-11): 1764-1769 (2005)

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