"Characterization of various insulators for possible use as low-k ..."

Maria Vasilopoulou et al. (2005)

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DOI: 10.1016/J.MICROREL.2004.11.009

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type: Journal Article

metadata version: 2022-02-17

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Maria Vasilopoulou, A. M. Douvas, D. Kouvatsos, Panagiotis Argitis, D. Davazoglou:
Characterization of various insulators for possible use as low-k dielectrics deposited at temperatures below 200degreeC. Microelectron. Reliab. 45(5-6): 990-993 (2005)

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