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"A new method for the lifetime determination of submicron metal ..."

Kris Vanstreels et al. (2005)

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DOI: 10.1016/J.MICROREL.2004.12.010

access: closed

type: Journal Article

metadata version: 2023-09-30

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Kris Vanstreels, Marc D'Olieslaeger, Ward De Ceuninck, Jan D'Haen, Karen Maex:
A new method for the lifetime determination of submicron metal interconnects by means of a parallel test structure. Microelectron. Reliab. 45(3-4): 753-759 (2005)

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