"Influence of the annealing temperature on the IR properties of ..."

V. Em. Vamvakas, D. Davazoglou (2005)

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DOI: 10.1016/J.MICROREL.2004.11.010

access: closed

type: Journal Article

metadata version: 2020-02-22

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V. Em. Vamvakas, D. Davazoglou:
Influence of the annealing temperature on the IR properties of SiO₂ films grown from SiH₄+O₂. Microelectron. Reliab. 45(5-6): 986-989 (2005)

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