"Characterization of Trench MOS Gate Structures Utilizing Photon Emission ..."

Masanori Usui et al. (2002)

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DOI: 10.1016/S0026-2714(02)00204-4

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type: Journal Article

metadata version: 2024-10-06

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Masanori Usui, Takahide Sugiyama, Masayasu Ishiko, Jun Morimoto, Hirokazu Saitoh, Masaki Ajioka:
Characterization of Trench MOS Gate Structures Utilizing Photon Emission Microscopy. Microelectron. Reliab. 42(9-11): 1647-1652 (2002)

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