"Improvement of poly-silicon hole induced gate oxide failure by silicon ..."

Summer F. C. Tseng, Wei-Ting Kary Chien, Bing-Chu Cai (2003)

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DOI: 10.1016/S0026-2714(03)00059-3

access: closed

type: Journal Article

metadata version: 2020-02-22

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Summer F. C. Tseng, Wei-Ting Kary Chien, Bing-Chu Cai:
Improvement of poly-silicon hole induced gate oxide failure by silicon rich oxidation. Microelectron. Reliab. 43(5): 713-724 (2003)

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