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"As-grown donor-like traps in low-k dielectrics and their impact on ..."

Baojun Tang et al. (2014)

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DOI: 10.1016/J.MICROREL.2014.07.089

access: closed

type: Journal Article

metadata version: 2022-12-02

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Baojun Tang, Kris Croes, Yohan Barbarin, Yunqi Wang, Robin Degraeve, Yunlong Li, Maria Toledano-Luque, Thomas Kauerauf, Jürgen Bömmels, Zsolt Tökei, Ingrid De Wolf:
As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability. Microelectron. Reliab. 54(9-10): 1675-1679 (2014)

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