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"Lightly Al-doped Ta2O5: Electrical properties and ..."

D. Spassov, Elena Atanassova, Albena Paskaleva (2011)

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DOI: 10.1016/J.MICROREL.2011.06.021

access: closed

type: Journal Article

metadata version: 2020-10-26

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D. Spassov, Elena Atanassova, Albena Paskaleva:
Lightly Al-doped Ta₂O₅: Electrical properties and mechanisms of conductivity. Microelectron. Reliab. 51(12): 2102-2109 (2011)

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