"Measuring the through-plane elastic modulus of thin polymer films in situ."

M. van Soestbergen et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.04.006

access: closed

type: Journal Article

metadata version: 2020-02-22

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M. van Soestbergen, Leo J. Ernst, Kaspar M. B. Jansen, W. D. van Driel:
Measuring the through-plane elastic modulus of thin polymer films in situ. Microelectron. Reliab. 47(12): 1983-1988 (2007)

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