"Stress evolution in the metal layers of TSVs with Bosch scallops."

Anderson Pires Singulani, Hajdin Ceric, Siegfried Selberherr (2013)

> Home

Details and statistics

DOI: 10.1016/J.MICROREL.2013.07.132

access: closed

type: Journal Article

metadata version: 2021-10-14

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mr/SingulaniCS13
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mr/SingulaniCS13
Anderson Pires Singulani, Hajdin Ceric, Siegfried Selberherr:
Stress evolution in the metal layers of TSVs with Bosch scallops. Microelectron. Reliab. 53(9-11): 1602-1605 (2013)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.